JPH01104034U - - Google Patents
Info
- Publication number
- JPH01104034U JPH01104034U JP19757387U JP19757387U JPH01104034U JP H01104034 U JPH01104034 U JP H01104034U JP 19757387 U JP19757387 U JP 19757387U JP 19757387 U JP19757387 U JP 19757387U JP H01104034 U JPH01104034 U JP H01104034U
- Authority
- JP
- Japan
- Prior art keywords
- pitch
- wafer
- holder
- groove
- explanatory diagrams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19757387U JPH0225236Y2 (en]) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19757387U JPH0225236Y2 (en]) | 1987-12-28 | 1987-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104034U true JPH01104034U (en]) | 1989-07-13 |
| JPH0225236Y2 JPH0225236Y2 (en]) | 1990-07-11 |
Family
ID=31488119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19757387U Expired JPH0225236Y2 (en]) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225236Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163500A (ja) * | 1992-11-26 | 1994-06-10 | Sugai:Kk | 基板の洗浄方法およびその装置 |
-
1987
- 1987-12-28 JP JP19757387U patent/JPH0225236Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163500A (ja) * | 1992-11-26 | 1994-06-10 | Sugai:Kk | 基板の洗浄方法およびその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0225236Y2 (en]) | 1990-07-11 |
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